国際学会発表・受賞情報

2024年11月20日にスロベニアのポルトロシュで行われたISAAT2024にて,本研究室のM2の学生2名が発表を行い,1名がExellent Paper Awardを受賞しました.

発表内容:

Development of a process model of micro-nano patterns toward a novel model-based process control in chemical mechanical polishing, ISAAT2024, Taku Ishihara, Norikazu Suzuki

Development of model-based process simulation technique for ultrasonic assisted grinding of quartz glass, ISAAT2024, Masayuki Takahashi, Kanta Ogura, Kaima Shimomura, Shun Otaka, Norikazu Suzuki

Primary study on micro/nano-scale process simulation for ultrasonic assisted grinding of hard brittle materials, ISAAT2024, Shun Otaka, Norikazu Suzuki