2022年9/27 （火）～9/29（木）にベンソンホテル（Portland, Oregon, U.S.A.）で開催された，ICPT2022（International Conference on Planarization Technology）で本研究室のM1の学生2名が口頭発表を行いました．
Takumi Sato, Session F (Sept. 28 14:40-15:00) “Experimental Investigation on Modified Preston Model by Utilizing Stop Polishing Method”
Kodai Hirano, Session G (Sept. 28 15:20-15:40) “State Estimation of CMP Process Using Model-Based Simulation”
