{"id":468,"date":"2022-05-25T13:22:57","date_gmt":"2022-05-25T04:22:57","guid":{"rendered":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/?page_id=468"},"modified":"2023-11-06T20:57:49","modified_gmt":"2023-11-06T11:57:49","slug":"%e8%ab%96%e6%96%87%e3%83%bb%e5%ad%a6%e4%bc%9a","status":"publish","type":"page","link":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/?page_id=468","title":{"rendered":"\u8ad6\u6587\u30fb\u5b66\u4f1a"},"content":{"rendered":"\n<p class=\"has-text-align-center\" style=\"font-size:30px\">\u30fc \u539f\u8457\u8ad6\u6587 \u30fc<\/p>\n\n\n\n<p class=\"has-medium-font-size\"> 2022\u5e74\u5ea6 <\/p>\n\n\n\n<ul><li>Novel method to visualize Preston\u2019s coefficient distribution for chemical mechanical polishing process, Japanese Journal of Applied Physics \uff08JJAP\uff09, 61, (2022), 116502, Yohei Hashimoto; Tatsuaki Furumoto; Takumi Sato, Norikazu Suzuki; Hozumi Yasuda; Satoru Yamaki; Yoshihiro Mochizuki, 10.35848\/1347-4065\/ac916b<\/li><li>Parameter Identification for Linear Model of the Milling Process Using Spindle Speed Variation, Precision Engineering, Volume 79, (2023) pp. 16-33, K. Takahei, S. Miwa, E. Shamoto, N. Suzuki, 10.1016\/j.precisioneng.2022.08.011<\/li><li>Identification of the Model Parameter for Milling Process Simulation with Sensor-integrated Disturbance Observer, Precision Engineering, Volume 78, (2022) pp. 146-162, K. Takahei, N. Suzuki, E. Shamoto, 10.1016\/j.precisioneng.2022.07.013<\/li><li>Process state estimation in Chemical Mechanical Polishing (CMP) by inverse analysis pf in-process data, CIRP Annals &#8211; Manufacturing Technology, Vol.71\/1 pp.273-276, (2022) in press N. Suzuki, R. Yamaguchi, Y. Hashimoto, H. Yasuda, S. Yamaki, Y. Mochizuki, 10.1016\/j.cirp.2022.04.060<\/li><\/ul>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p class=\"has-text-align-center\" style=\"font-size:30px\">\u30fc \u56fd\u969b\u4f1a\u8b70\u8ad6\u6587 \u30fc<\/p>\n\n\n\n<p class=\"has-medium-font-size\">2023\u5e74\u5ea6  <\/p>\n\n\n\n<ul><li>Influence of vibration condition on tool life in Low-Frequency vibration cutting of difficult-to-cut materials, Proceedings of the international conference on leading edge manufacturing\/materials and processing (LEM&amp;P2023),LEMP 2023-068, Yukio Takahashi, Genki Murata, Hiroto Teratani, Noriazu Suzuki<\/li><\/ul>\n\n\n\n<p class=\"has-medium-font-size\">2022\u5e74\u5ea6 <\/p>\n\n\n\n<ul><li>Estimation of hardness and residual stress on the end milled surface by linear regression model, Proceedings of ICPE2022, in press, Hideyuki FUJII, Yukio TAKAHASHI, Reo YANO, Norikazu SUZUKI, Yuki YAMADA, Yasuhiro IMABEPPU, Naruhiro IRINO<\/li><li>High efficient machining condition prediction model by machine learning of real and simulated cutting data, Proceedings of ICPE2022, in press, Kengo KAWAI, Naruhiro IIRINO, Hajime MIZUYAMA, Atsushi MATSUBARA, Norikazu SUZUKI, Yasuhiro IMABEPPU, Yuta SHINBA<\/li><li><a href=\"https:\/\/nccavs-usergroups.avs.org\/wp-content\/uploads\/2023\/01\/ICPT22-Abstract-Session-F5-Sato.pdf\" data-type=\"URL\" data-id=\"https:\/\/nccavs-usergroups.avs.org\/wp-content\/uploads\/2023\/01\/ICPT22-Abstract-Session-F5-Sato.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">Experimental investigation on modified Preston model by utilizing stop polishing method, Proceedings of The International Conference on Planarization Technology (ICPT 2022), in press, Takumi Sato, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki<\/a><\/li><li><a href=\"https:\/\/nccavs-usergroups.avs.org\/wp-content\/uploads\/2023\/01\/ICPT22-Abstract-Session-G1-Hirano.pdf\" data-type=\"URL\" data-id=\"https:\/\/nccavs-usergroups.avs.org\/wp-content\/uploads\/2023\/01\/ICPT22-Abstract-Session-G1-Hirano.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">State estimation of CMP process using model-based simulation, Proceedings of The International Conference on Planarization Technology (ICPT 2022), in press, Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki<\/a><\/li><li>TIME DOMAIN SIMULATION OF TURNING OPERATIONS WITH FLANK TEXTURED TOOL ,Proceedings of the ASME2022 17th International manufacturing Science and Engineerinf Conference MSEC2022, MSEC2022-85130, (June 27-July 1, 2022, West Lafayette, Indiana, USA), Norikazu Suzuki, Tsubasa Fujinaka, Yuya Yokokawa<\/li><\/ul>\n\n\n\n<p class=\"has-medium-font-size\"> 2021\u5e74\u5ea6 <\/p>\n\n\n\n<ul><li>Time domain simulation of turning process considering amplitude-dependency in process damping, The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21), November 14-18, 2021, (C12) pp.220-223, (2021), Tsubasa Fujinaka, Norikazu Suzuki, Tomoki Nakanomiya, Eiji Shamoto<\/li><li>Analytical study on identification of milling simulation parameters by utilizing spindle speed variation method, The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21), November14-18, 2021, (A11)pp.34-37,(2021) , Satoshi MIWA, Norikazu SUZUKI, Kazuki TAKAHEI, Eiji SHAMOTO<\/li><li>Time domain simulation of dynamic corner milling process considering chatter vibration with finite amplitude, Proceedings of the ASME 2021 16th International manufacturing Science and Engineering Conference, MSEC2021, MSEC2021-60651, Norikazu Suzuki, Hiroki Hayashi, Eiji Shamoto, Naruhiro Irino, Yasuhiro Imabeppu<\/li><\/ul>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p class=\"has-text-align-center\" style=\"font-size:30px\">\u30fc \u56fd\u5185\u5b66\u4f1a\u30fb\u62db\u5f85\u8b1b\u6f14 \u30fc<\/p>\n\n\n\n<p class=\"has-medium-font-size\">2023\u5e74\u5ea6<\/p>\n\n\n\n<p class=\"has-medium-font-size\"> <\/p>\n\n\n\n<ul><li>\u52a0\u5de5\u97f3\u3092\u5229\u7528\u3057\u305f\u65cb\u524a\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u52a0\u5de5\u632f\u52d5\u306e\u975e\u63a5\u89e6\u63a8\u5b9a\u6280\u8853\u306e\u958b\u767a\uff0c2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u79cb\u5b63\u5927\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.67-68 (2023), \u771e\u5d0e\u4e8c\u5343\u6d77\uff0c\u9234\u6728\u6559\u548c<\/li><li>\u4e3b\u8ef8\u56de\u8ee2\u6570\u306e\u77ac\u6642\u5909\u5316\u3092\u5229\u7528\u3057\u305f\u52d5\u7684\u30df\u30ea\u30f3\u30b0\u30e2\u30c7\u30eb\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u9ad8\u901f\u540c\u5b9a\u624b\u6cd5\u306e\u5b9f\u9a13\u7684\u691c\u8a3c\uff0c2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u79cb\u5b63\u5927\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.77-78 (2023), \u85e4\u4e95\u79c0\u884c\uff0c\u9234\u6728\u6559\u548c<\/li><\/ul>\n\n\n\n<p class=\"has-medium-font-size\">2022\u5e74\u5ea6<\/p>\n\n\n\n<ul><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2023\/pdf\/I10.pdf\" target=\"_blank\">\u5207\u524a\u97f3\u3092\u5229\u7528\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u306e\u958b\u767a\uff0c2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c30\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8ad6\u6587\u96c6\uff0cpp.16-17 (2023)\uff0c\u771e\u5d0e\u4e8c\u5343\u6d77\uff0c\u9234\u6728\u6559\u548c<\/a><\/li><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2023\/pdf\/I17.pdf\" target=\"_blank\">\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u5f62\u72b6\u3092\u8003\u616e\u3057\u305f\u7825\u7c92\u6319\u52d5\u306e\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\uff0c2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c30\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u8b1b\u6f14\u4f1a\u8ad6\u6587\u96c6\uff0cpp.22-23 (2023)\uff0c\u77f3\u539f\u6c70\u516c\uff0c\u9234\u6728\u6559\u548c\uff0c\u6a4b\u672c\u6d0b\u5e73\uff0c\u5c71\u6728\u6681\uff0c\u5b89\u7530\u7a42\u7a4d\uff0c\u671b\u6708\u5b9c\u5b8f<\/a><\/li><li><a href=\"http:\/\/sotsuken.jspe.or.jp\/2023\/pdf\/I32.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">\u9001\u308a\u7cfb\u306e\u5916\u4e71\u4f1d\u9054\u7279\u6027\u304c\u30df\u30ea\u30f3\u30b0\u306e\u3073\u3073\u308a\u5b89\u5b9a\u6027\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u306e\u30e2\u30c7\u30eb\u30d9\u30fc\u30b9\u89e3\u6790\uff0c2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c30\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u8b1b\u6f14\u4f1a\u8ad6\u6587\u96c6\uff0cpp48-49 (2023)\uff0c\u6cb3\u5948\u88d5\u592a\u90ce\uff0c\u9234\u6728\u6559\u548c<\/a><\/li><li>\u5207\u524a\u52a0\u5de5\u306e\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u5b9f\u73fe\u3059\u308b\u30e2\u30c7\u30eb\u5316\u6280\u8853\u3068\u52a0\u5de5\u7d50\u679c\u4e88\u6e2c, \u7825\u7c92\u52a0\u5de5\u5b66\u4f1a \u5317\u9678\u4fe1\u8d8a\u5730\u533a\u90e8\u4f1a \u4ee4\u548c3\u5e74\u5ea6\u5730\u533a\u90e8\u4f1a\u5927\u4f1a \u7b2c1\u56de\u7814\u7a76\u4f1a\u300c\u5317\u9678\u4fe1\u8d8a\u652f\u90e8\u306e\u5927\u5b66\u30fb\u516c\u8a2d\u8a66\u9a13\u5834\u306b\u3088\u308b\u65b0\u6280\u8853\u767a\u4fe1\u3068\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u306e\u52d8\u3069\u3053\u308d\u300d, in press, \u9234\u6728\u6559\u548c<\/li><li>CMP simulation technology, Asia Pacific Semiconductor Packaging Symposium, in press, \u9234\u6728\u6559\u548c<\/li><li>\u9ad8\u7cbe\u5ea6\u30df\u30ea\u30f3\u30b0\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u5b9f\u73fe\u3059\u308b\u30e2\u30c7\u30eb\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u65b0\u3057\u3044\u540c\u5b9a\u624b\u6cd5, \u7b2c\uff119\u56de\u56fd\u969b\u5de5\u4f5c\u6a5f\u68b0\u6280\u8853\u8005\u4f1a\u8b70\uff08\u30dd\u30b9\u30bf\u30fc\u30bb\u30c3\u30b7\u30e7\u30f3\uff09\u8ad6\u6587\u96c6 pp.???, (2022) in press, \u9234\u6728\u6559\u548c\uff0c\u85e4\u4e95\u79c0\u884c\uff0c\u9ad8\u6a4b\u5e78\u7537<\/li><li>\u7dda\u5f62\u56de\u5e30\u30e2\u30c7\u30eb\u306b\u3088\u308b\u4ed5\u4e0a\u3052\u9762\u306e\u786c\u3055\u3068\u6b8b\u7559\u5fdc\u529b\u306e\u63a8\u5b9a, 2022\u5e74\u5ea6\u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u5e74\u6b21\u5927\u4f1a, \u9ad8\u6a4b\u5e78\u7537\u30fb\u85e4\u4e95\u79c0\u884c\u30fb\u77e2\u91ce\u793c\u7dd2\u30fb\u9234\u6728\u6559\u548c\uff0c\u5c71\u7530\u96c4\u57fa\u30fb\u4eca\u5225\u5e9c\u6cf0\u5b8f\u30fb\u5165\u91ce\u6210\u5f18<\/li><\/ul>\n\n\n\n<p class=\"has-medium-font-size\">2021\u5e74\u5ea6<\/p>\n\n\n\n<ul><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K10.pdf\" data-type=\"URL\" data-id=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K10.pdf\" target=\"_blank\">\u30c1\u30bf\u30f3\u5408\u91d1\u306e\u4f4e\u5468\u6ce2\u632f\u52d5\u5207\u524a\u306b\u304a\u3051\u308b\u5de5\u5177\u6469\u8017\u751f\u6210\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u5206\u6790, 2022\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c29\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.16-17 (2022), \u5bfa\u8c37\u6d69\u767b\uff0c\u9ad8\u6a4b\u5e78\u7537\uff0c\u77e2\u91ce\u793c\u7dd2\uff0c\u9234\u6728\u6559\u548c<\/a><\/li><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K16.pdf\" data-type=\"URL\" data-id=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K16.pdf\" target=\"_blank\">\u30e2\u30c7\u30eb\u30d9\u30fc\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u5229\u7528\u3057\u305fCMP\u30d7\u30ed\u30bb\u30b9\u306e\u72b6\u614b\u91cf\u63a8\u5b9a, 2022\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c29\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.20-21 (2022), \u5e73\u91ce\u822a\u5927\uff0c\u9234\u6728\u6559\u548c\uff0c\u6a4b\u672c\u6d0b\u5e73\uff0c\u5c71\u6728\u6681\uff0c\u5b89\u7530\u7a42\u7a4d\uff0c\u671b\u6708\u5b9c\u5b8f<\/a><\/li><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K20.pdf\" data-type=\"URL\" data-id=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K20.pdf\" target=\"_blank\">\u7814\u78e8\u6761\u4ef6\u304cCMP\u30d7\u30ed\u30bb\u30b9\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u306e\u5b9f\u9a13\u7684\u691c\u8a3c, 2022\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c29\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.28-29 (2022), \u4f50\u85e4\u62d3\u5b9f\uff0c\u9234\u6728\u6559\u548c\uff0c\u6a4b\u672c\u6d0b\u5e73\uff0c\u5c71\u6728\u6681\uff0c\u5b89\u7530\u7a42\u7a4d\uff0c\u671b\u6708\u5ba3\u5b8f<\/a><\/li><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K22.pdf\" data-type=\"URL\" data-id=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K22.pdf\" target=\"_blank\">\u6709\u9650\u632f\u52d5\u632f\u5e45\u306e\u5f71\u97ff\u3092\u8003\u616e\u3057\u305f\u6642\u9593\u9818\u57df\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308b\u52a0\u5de5\u9762\u306e\u4e88\u6e2c, 2022\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c29\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.30-31 (2022), \u7a0b\u539f\u8ff0\u82f1\uff0c\u9234\u6728\u6559\u548c<\/a><\/li><li><a rel=\"noreferrer noopener\" href=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K24.pdf\" data-type=\"URL\" data-id=\"http:\/\/sotsuken.jspe.or.jp\/2022\/pdf\/K24.pdf\" target=\"_blank\">\u9003\u3052\u9762\u30c6\u30af\u30b9\u30c1\u30e3\u5de5\u5177\u306b\u3088\u308b\u3073\u3073\u308a\u6291\u5236\u52b9\u679c\u306e\u6642\u9593\u9818\u57df\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3, 2022\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\uff0c\u7b2c29\u56de\u5b66\u751f\u4f1a\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6\uff0cpp.34-35 (2022), \u6a2a\u5ddd\u512a\u5f25\uff0c\u9234\u6728\u6559\u548c\uff0c\u85e4\u4e2d\u7ffc<\/a><\/li><li>\u300c\u5207\u524a\u52a0\u5de5\u306e\u3073\u3073\u308a\u632f\u52d5\u3084\u77e5\u80fd\u5316\u6280\u8853\u300d\u306a\u3069\u306e\u7814\u7a76\u306b\u3064\u3044\u3066, \u7b2c8\u56de\u751f\u7523\u52a0\u5de5\u90e8\u9580\u59d4\u54e1\u4f1a \u8a71\u984c\u63d0\u4f9b\uff08\u81ea\u52d5\u8eca\u6280\u8853\u4f1a \u751f\u7523\u52a0\u5de5\u90e8\u9580\u59d4\u54e1\u4f1a\uff09, \u9234\u6728\u6559\u548c<\/li><li>\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u306e\u30b9\u30de\u30fc\u30c8\u5316\u3092\u652f\u3048\u308b\u30e2\u30c7\u30eb\u30d9\u30fc\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3, KENMA\u7814\u7a76\u4f1a\u3000\u7b2c20\u56de\u7814\u7a76\u4f1a\u3000\uff0d\u7814\u78e8\u306e\u30e2\u30c7\u30ea\u30f3\u30b0\u30fb\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u30fb\u6319\u52d5\u8a55\u4fa1\u3068\u7523\u696d\u5c55\u958b\uff0d, \u9234\u6728\u6559\u548c<\/li><li>\u52d5\u7684\u5207\u524a\u30d7\u30ed\u30bb\u30b9\u306e\u30e2\u30c7\u30eb\u30d9\u30fc\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3068\u3073\u3073\u308a\u632f\u52d5\u306e\u56de\u907f, \u7825\u7c92\u52a0\u5de5\u5b66\u4f1a \u5317\u9678\u4fe1\u8d8a\u5730\u533a\u90e8\u4f1a \u4ee4\u548c3\u5e74\u5ea6\u5730\u533a\u90e8\u4f1a\u5927\u4f1a \u7b2c1\u56de\u7814\u7a76\u4f1a\u300c\u5317\u9678\u4fe1\u8d8a\u652f\u90e8\u306e\u5927\u5b66\u30fb\u516c\u8a2d\u8a66\u9a13\u5834\u306b\u3088\u308b\u65b0\u6280\u8853\u767a\u4fe1\u3068\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u306e\u52d8\u3069\u3053\u308d\u300d, \u9234\u6728\u6559\u548c<\/li><li>Development of Cyber-Physical-System for CMP process utilizing model-based simulation, The 6th Ebara Open Innovation Symposium on CMP, \u9234\u6728\u6559\u548c<\/li><li>CMP\u30d7\u30ed\u30bb\u30b9\u306e\u30e2\u30c7\u30eb\u5316\u3068\u88c5\u7f6e\u306e\u30a4\u30f3\u30d7\u30ed\u30bb\u30b9\u30c7\u30fc\u30bf\u3092\u5229\u7528\u3057\u305f\u72b6\u614b\u91cf\u63a8\u5b9a, \u30d7\u30e9\u30ca\u30ea\u30bc\u30fc\u30b7\u30e7\u30f3CMP\u3068\u305d\u306e\u5fdc\u7528\u6280\u8853\u5c02\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c190\u56de\u7814\u7a76\u4f1a, \u9234\u6728\u6559\u548c<\/li><\/ul>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p class=\"has-text-align-center\" style=\"font-size:30px\">\u30fc \u305d\u306e\u4ed6 \u30fc<\/p>\n\n\n\n<ul><li>\u4e2d\u592e\u5927\u5b66\u3000\u30c7\u30b8\u30bf\u30eb\u751f\u7523\u5de5\u5b66\u7814\u7a76\u5ba4, \u7825\u7c92\u52a0\u5de5\u5b66\u4f1a\u8a8c, 66\u5dfb4\u53f7, pp.202, (2022), \u9234\u6728\u6559\u548c<\/li><li>DX\u6642\u4ee3\u306e\u5de5\u4f5c\u6a5f\u68b0\u3068\u30b9\u30de\u30fc\u30c8\u30d5\u30a1\u30af\u30c8\u30ea\u30fc, \u65e5\u520a\u5de5\u696d\u65b0\u805e3\u670818\u65e5, 28\u9762, (2022), \u9234\u6728\u6559\u548c<\/li><\/ul>\n","protected":false},"excerpt":{"rendered":"<p>\u30fc \u539f\u8457\u8ad6\u6587 \u30fc 2022\u5e74\u5ea6 Novel method to visualize Preston\u2019s coefficient distribution for chemical mechanical polishing &hellip; <\/p>\n<p class=\"link-more\"><a href=\"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/?page_id=468\" class=\"more-link\">Read more<span class=\"screen-reader-text\"> &#8220;\u8ad6\u6587\u30fb\u5b66\u4f1a&#8221;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/pages\/468"}],"collection":[{"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=468"}],"version-history":[{"count":17,"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/pages\/468\/revisions"}],"predecessor-version":[{"id":704,"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=\/wp\/v2\/pages\/468\/revisions\/704"}],"wp:attachment":[{"href":"https:\/\/www.mech.chuo-u.ac.jp\/digitalmanufacturing\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=468"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}